Prior to the development of 300mm wafers, SEMI SECS-II E5 and GEM E30 were the initial standards for enabling IC makers to communicate and control the wafer processing equipment.
With the introduction of larger and heavier 300 mm wafers and smaller chip topologies, it has became impractical for operators to load or unload materials and expose to the risk of contamination. Hence, semiconductor factories required a significant change to automate material delivery to each equipment using OHT (Overhead Hoist Transport) or AGV (Automated Guided Vehicle) so to maximise production throughput.
Implementing GEM300 Compliant Standards
The main challenges for equipment supplier are first to understand how these complex standards work and how to implement them onto their equipment controller software.
STHGEM300 is a software development toolkit for implementing GEM300 standards for equipment manufacturer. Our product documentation, a complete working examples (with a step by step quick start guide to run a full end to end GEM300 operational scenarios that comply with SEMATECH and SELETE requirements) and technical expertise will dramatically reduces the development time and improve time to market.
Contact us sales@insphere.com.sg to understand more about our product.
What is GEM300?
GEM300 is a "group of standards" and often referred to as the "SEMI 300mm Standards" (SEMI E39, SEMI E40, SEMI E87, SEMI E90 and SEMI E94). It provides a more sophisticated and standardized approach that factory host can use for control and material handling.
GEM300 is built on top of SECS/GEM standards as illustrated in the diagram below:
GEM300 Standards
SEMI Standard | Description | Purpose |
|---|---|---|
E87 | Specification for Carrier Management (CMS) | Manages the delivery, the handling and the validation of the material. The objective is to validate that the expected material has been delivered to the equipment |
E90 | Specification for Substrate Tracking Management | Defines a standard means for tracking substrates in manufacturing in the same manner as E87 does for Carriers |
E40 | Specification for Processing Management (PJM) | Process job management is concerned with the processing of material by a processing resource. It's function is to ensure that material delivered to the process module is processed with the correct recipe |
E94 | Specification for Control Job Management (CJM) | Provides a supervisory level of control for Process Jobs on material processing equipment, allowing hosts to manage complex processing scenarios. |
E39 | Object Services Standard: Concepts, Behavior, and Services | Defines how various types of objects are dynamically created and deleted during material processing. Specifies object attribute interaction |