top of page
智能工厂
SECS/GEM 产品套件
智能连接设备
Supported SEMI Standards:
-
SEMI E4 - RS232
-
SEMI E37 - HSMS
-
SEMI E5 - SECS II Message Specifications
-
SEMI E30 - GEM
Supported SEMI Standards:
-
SEMI E4 - RS232
-
SEMI E37 - HSMS
-
SEMI E5 - SECS-II Message Specification
-
SEMI E30 - GEM
-
SEMI E39 - Object Services
-
SEMI E87 - Carrier Management
-
SEMI E90 - Substrate Tracking
-
SEMI E40 - Process Job Management
-
SEMI E94 - Control Job Management
-
SEMI E116 - Equipment Performance Tracking (future release)
智能连接设备
Supported SEMI Standards:
-
SEMI E4 - RS232
-
SEMI E37 - HSMS
-
SEMI E5 - SECS II Message Specifications
-
SEMI E30 - GEM
Supported SEMI Standards:
-
SEMI E37 - HSMS
-
SEMI E5 - SECS-II Message Specification
-
SEMI E30 - GEM
bottom of page