top of page

智能工厂 

SECS/GEM 产品套件

智能连接设备

Supported SEMI Standards:

  • SEMI E4 - RS232

  • SEMI E37 - HSMS

  • SEMI E5 - SECS II Message Specifications

  • SEMI E30 - GEM

Supported SEMI Standards:

  • SEMI E4 - RS232

  • SEMI E37 - HSMS

  • SEMI E5 - SECS-II Message Specification

  • SEMI E30 - GEM

  • SEMI E39 - Object Services

  • SEMI E87 - Carrier Management

  • SEMI E90 - Substrate Tracking

  • SEMI E40 - Process Job Management

  • SEMI E94 - Control Job Management

  • SEMI E116 - Equipment Performance Tracking (future release)

SecsToPLC.Net - SECS/GEM for PLC

Supported SEMI Standards:

  • SEMI E37 - HSMS

  • SEMI E5 - SECS II Message Specifications

  • SEMI E30 - GEM

智能连接设备

Supported SEMI Standards:

  • SEMI E4 - RS232

  • SEMI E37 - HSMS

  • SEMI E5 - SECS II Message Specifications

  • SEMI E30 - GEM

Supported SEMI Standards:

  • SEMI E37 - HSMS

  • SEMI E5 - SECS-II Message Specification

  • SEMI E30 - GEM

bottom of page