STHGEM300
用于 300mm 工具的 SECS/GEM 软件解决方案
解决方案概述
其他资源
设备制造商使用 STHGEM300 SDK 来实施 300 毫米晶圆加工设备所需的 SEMI GEM300 兼容标准——E39、E40、E87、E90 和 E94。
半导体工厂要求所有 300mm 工具都符合这些行业标准，以及工厂特定的场景。
STHGEM300 基于我们的旗舰产品 SecsToHost.Net 构建，这是一个用于实施 SEMI SECS/GEM E4、E5、E30 和 E37 的软件 SDK。 .NET 库可以轻松集成到您的设备控制器软件中。
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SEMI E4 - RS232
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SEMI E37 - HSMS
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SEMI E5 - SECS-II Message Specifications
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SEMI E30 - GEM
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SEMI E39 - Object Services
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SEMI E87 - Carrier Management
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SEMI E90 - Substrate Tracking
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SEMI E40 - Process Job management
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SEMI E94 - Control Job Management
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SEMI E116 - Equipment Performance Tracking (future release）
支持的 SEMI 标准
Features and Benefits
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Ease of
Integration
Navigate GEM300 complex scenarios effortlessly with STHGEM300's intelligent API calls, minimizing development costs and efforts for equipment suppliers.
Simplified
GEM300 Scenarios
Automatic message processing and manages interdependencies between GEM300 standards.
Comply with SEMATECH and SELETE Guideline
Ensure compatibility with any factory host automation specification covering SECS/GEM, process management, carrier management, substrate tracking, control job management and equipment performance.
Cross Platform
Support
Ensures compatibility across various platforms (Windows and Linux) with .NET Core.
Automatic GEM300 Documentation
Time saving with the automatic SEMI documentation generation with Model Builder.